Photoresist soft bake lamp
On the litho floor, soft bake temperature drift doesn’t show up as a glaring failure. It shows up as line-width variation, solvent hanging around in...
Photoresist drying infrared module
On the litho floor, a half-degree drift in soft bake isn’t a “tolerance.” It’s a scrapped wafer. Photoresist drying lives and dies on thermal...
Photoresist stripping support heater
On the lithography floor, a support heater going down during photoresist stripping stops the line cold. Wafers start piling up with residues, scrap...