Photoresist soft bake lamp
On the litho floor, soft bake temperature drift doesn’t show up as a glaring failure. It shows up as line-width variation, solvent hanging around in...
Spin coater bake lamp
On the lithography floor, a half-degree drift in bake temperature is enough to scrap an entire wafer lot. Soft bake and hard bake aren’t just...
Polyimide bake infrared lamp
On the line, the clock doesn’t wait for anyone. A 300 mm wafer flows from coat to soft bake, then into exposure, and the thermal budget you set in...