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		<title>模块 on Infrared Glass Heating Technology</title>
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				<title>光阻干燥红外模块</title>
				<link>http://ir-glass-heat.com/zh/posts/photoresist-drying-infrared-module/</link>
				<pubDate>Sun, 28 Jun 2026 05:44:04 +0800</pubDate>
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				<description>&lt;p&gt;&lt;img src=&#34;http://ir-glass-heat.com/images/594cd14ba0fdce93f512a6ddf4ebf45d.png&#34; alt=&#34;光阻干燥红外模块&#34;&gt;&lt;/p&gt;&#xA;&lt;p&gt;在晶圆加工过程中，如果软烘烤时的温度偏差超过半度，那就已经超出允许范围了，这样的晶圆自然会被废弃。光刻胶的干燥程度取决于温度控制是否精确，而红外模块则是决定产品合格率的关键因素。&lt;/p&gt;</description>
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